Products application:
Widely used in vacuum coating, oven, heat treatment, pharmaceutical, chemical applications, semiconductor, LED and solar cell industry, etc...
Model Unit RSE 80
Pumping speed l/min 2500/3000
cubic meter per hour 80/86
cfm 88/106
Ultimate Pressure Torr <7.5* 10 ^(-3)
mbar <1*10 ^(-2)
Pa <1
Motor frequency Hz 50/60
Voltage V 220-440
Power Hp 6
Kw 4.47
Connection inlet
Nw50
outlet
Nw40
cooling flow l/min 3L/min 15Celsius-7L/min30Celsius
Temprature Celsius
Pressure kg/square centimeters 2.0-4
connection
R/C 3/8"
N2 pressure Kg/square centimeters 0.5~1
dilute flow l/min 0~60
sealing flow l/min 0~20
connection
Swagelok 1/4"
Dimension:L*W*H: mm 920*430*650
weight: kg 320
Noise: dB(A) <70
interface
SEMIE73-0299
pump leak rate: mbar .l/s 1*10^(-5)
Ambient Temp: Celsius 5~40Celsius
operatoin mositure: RH 90%