Purity Grade 99.999%
Tetrafluoromethane is sometimes used as a low temperature refrigerant. It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.
Alternative Name Carbon tetrafluoride, Perfluoromethane, Tetrafluorocarbon, Freon 14, Halon 14, Arcton 0, CFC 14, PFC 14, R 14,UN 1982
Molecular Weight 88.0043g/ mol
CAS No. 75-73-0
Package 44L 49L