Products application: Widely used in vacuum coating, oven, heat treatment, pharmaceutical, chemical applications, semiconductor, LED and solar cell industry, etc... Model Unit RSE 80 Pumping speed l/min 2500/3000 cubic meter per hour 80/86 cfm 88/106 Ultimate Pressure Torr <7.5* 10 ^(-3) mbar <1*10 ^(-2) Pa <1 Motor frequency Hz 50/60 Voltage V 220-440 Power Hp 6 Kw 4.47 Connection inlet Nw50 outlet Nw40 cooling flow l/min 3L/min 15Celsius-7L/min30Celsius Temprature Celsius Pressure kg/square centimeters 2.0-4 connection R/C 3/8" N2 pressure Kg/square centimeters 0.5~1 dilute flow l/min 0~60 sealing flow l/min 0~20 connection Swagelok 1/4" Dimension:L*W*H: mm 920*430*650 weight: kg 320 Noise: dB(A) <70 interface SEMIE73-0299 pump leak rate: mbar .l/s 1*10^(-5) Ambient Temp: Celsius 5~40Celsius operatoin mositure: RH 90%